Plasma Ion Nitriding System
incl. GST
- Process chamber with thermal insulation and cooling facility
- Novel hot retort design to enhance heat transfer and lower heat losses
- Three zone heating with independent PID control provides excellent thermal uniformity
- PLC / PC based control with SCADA package to provide recipe storage, recall for process repeatability.
- Closed loop PID based pressure control with capacitance manometer and motorized valve.
- Precision mass flow controllers provide precise control over gas phase chemistry and process.
- Pulsed dc power supply with advanced arc management and setting of pulse frequency and duty cycle
- Online fine temperature control by interactive duty cycle control during nitriding
- Integration of dual process chamber to enhance productivity (optional).
- PIN equipment for process chamber up to 900º C available on request
Milman Thin Film Systems Private Limited 
